SU6600
SU6600 Analytical VP FESEM
The SU6600 is Hitachi's latest high resolution analytical field emission SEM with Variable Pressure technology allowing observation and analysis of any type of wet, oily or dirty sample. Advanced Schottky electron gun technology combined with our patented ADAPT, automated differential aperture system, yields greater than 200nA of current; ten times the current other manufacturers can provide with thermal emissions. The large analytical chamber accommodates EDS, WDS, EBSP and CL simultaneously and at the same analytical working distance.
| Electron Gun |
ZrO/W Schottky Electron Source |
| Beam Current |
Less than or equal to 200nA Automated Differential Aperture technology |
| Resolution |
1.2nm at 30kV 3.0nm at 1kV 3.0nm at 60Pa with ESED 3.0nm at 30Pa with BSED |
| Stage |
110mm x 110mm; X and Y |
| Chamber |
Large analytical chamber |