- 1.4nm resolution at 1kV with Beam Deceleration Technology
- 1.0nm Resolution at 15kV
- New Super ExB Filter
- 200mm specimen diameter
- 5 Axis motorized stage
- Advanced dry vacuum system
The S-4800 compliments the field proven performance and reliability of the S-4700 and S-5200 Field Emission SEMs. It employs a semi in-lens detector designed for large sample accomodation while achieving ultra-high resolution at low accelerating voltages. A new objective lens design with Hitachi's patented Super ExB filter technology collects and separates the various components of pure SE, compositional SE and BSE electron signals. The S-4800 can be fully integrated with many optional accessories including Energy Dispersive X-ray Spectrometer (EDX) and Electron Backscattered Diffraction Pattern (EBDP) systems. Ideal for ultra-high resolution appilcations such as semiconductor, materials studies and nanotechnology.
